PECVD NANO-MASTER, Inc. Plasma Enhanced …
2018-7-25 · PECVD Systems. NANO-MASTER's PECVD systems are capable of depositing high quality SiO 2, Si 3 N 4, CNT, DLC or SiC films.Depending on application, RF showerhead, Hollow Cathode, ICP or Microwave plasma sources can be used.